Method of processing a workpiece in a plasma reactor employing a dynamically adjustable plasma source power applicator

ABSTRACT

A method for processing a workpiece in a plasma reactor chamber having radially inner and outer source power applicators at a ceiling of the chamber facing the workpiece, the inner and outer source power applicators and the workpiece sharing a common axis of symmetry. The method includes applying RF source power to the source power applicator, and introducing a process gas into the reactor chamber so as to carry out a plasma process on the workpiece characterized by a plasma process parameter, the plasma process parameter having a spatial distribution across the surface of the workpiece. The method further includes rotating at least the outer RF source power applicator about a radial tilt axis to a position at which the spatial distribution of the plasma process parameter has at least a nearly minimal non-symmetry relative to the common axis of symmetry, and translating the inner source power applicator relative to the outer source power applicator along the axis of symmetry to a location at which the spatial distribution has at least a nearly minimal non-uniformity across the surface of the workpiece.

BACKGROUND OF THE INVENTION

In semiconductor device fabrication involving plasma processing to formnanometer-scale feature sizes across a large workpiece, a fundamentalproblem has been plasma uniformity. For example, the workpiece may be a300 mm semiconductor wafer or a rectangular quartz mask (e.g., 152.4 mmby 152.4 mm), so that maintaining a uniform etch rate relative tonanometer-sized features across the entire area of a 300 mm diameterwafer (for example) is extremely difficult. The difficulty arises atleast in part from the complexity of the process. A plasma-enhanced etchprocess typically involves simultaneous competing processes ofdeposition and etching. These processes are affected by the process gascomposition, the chamber pressure, the plasma source power level (whichprimarily determines plasma ion density and dissociation), the plasmabias power level (which primarily determines ion bombardment energy atthe workpiece surface), wafer temperature and the process gas flowpattern across the surface of the workpiece. The distribution of plasmaion density, which affects process uniformity and etch ratedistribution, is itself affected by RF characteristics of the reactorchamber, such as the distribution of conductive elements, thedistribution of reactances (particularly capacitances to ground)throughout the chamber, and the uniformity of gas flow to the vacuumpump. The latter poses a particular challenge because typically thevacuum pump is located at one particular location at the bottom of thepumping annulus, this location not being symmetrical relative to theeither the workpiece or the chamber. All these elements involveasymmetries relative to the workpiece and the cylindrically symmetricalchamber, so that such key parameters as plasma ion distribution and/oretch rate distribution tend to be highly asymmetrical.

The problem with such asymmetries is that conventional control featuresfor adjusting the distribution of plasma etch rate (or deposition rate)across the surface of the workpiece are capable of making adjustments orcorrections that are symmetrical relative to the cylindrical chamber orthe workpiece or the workpiece support. (Examples of such conventionalfeatures include independently driven radially inner and outersource-power driven coils, independently supplied radially inner andouter gas injection orifice arrays in the ceiling, and the like.) Suchfeatures are, typically, incapable of completely correcting fornon-uniform distribution of plasma ion density or correcting for anon-uniform distribution of etch rate across the workpiece (forexample). The reason is that in practical application, suchnon-uniformities are asymmetrical (non-symmetrical) relative to theworkpiece or to the reactor chamber.

There is, therefore, a need to enable conventional control features foradjusting distribution of plasma process parameters (e.g., distributionacross the workpiece of either etch rate, or etch microloading, orplasma ion density, or the like) to correct the type of asymmetrical ornon-symmetrical non-uniformities that are encountered in actual plasmaprocess environments.

SUMMARY OF THE INVENTION

A plasma reactor for processing a workpiece includes a process chamberhaving an enclosure including a ceiling and having a vertical axis ofsymmetry generally perpendicular to the ceiling, a workpiece supportpedestal inside the chamber and generally facing the ceiling, processgas injection apparatus coupled to the chamber and a vacuum pump coupledto the chamber. The reactor further includes a plasma source powerapplicator overlying the ceiling and having a radially inner applicatorportion and a radially outer applicator portion, and RF power apparatuscoupled to the inner and outer applicator portions, and tilt apparatussupporting at least the outer applicator portion and capable of tiltingat least the outer applicator portion about a radial axis perpendicularto the axis of symmetry and capable of rotating at least the outerapplicator portion about the axis of symmetry. The reactor can furtherinclude elevation apparatus for changing the location of the inner andouter portions relative to one another along the vertical axis ofsymmetry. In a preferred embodiment, the elevation apparatus includes alift actuator for raising and lowering the inner applicator portionalong the vertical axis of symmetry.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 depicts a reactor of a first preferred embodiment.

FIGS. 2A and 2B depict the operation of a tilt adjustment mechanism inthe embodiment of FIG. 1.

FIGS. 3A, 3B and 3C depict successive steps in the operation of theembodiment of FIG. 1.

FIGS. 4A, 4B and 4C depict the etch rate distribution across the surfaceof a workpiece obtained in the respective steps of FIGS. 3A, 3B and 3C.

FIG. 5 depicts a reactor of a second preferred embodiment.

FIG. 6 depicts a reactor in accordance with an alternative embodiment.

FIG. 7 is a block flow diagram depicting a first method of theinvention.

FIG. 8 is a block flow diagram depicting a second method of theinvention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention is based upon the inventors' discovery thatspatial distribution across the workpiece surface of a plasma processparameter (such as etch rate) may be transformed from an asymmetricaldistribution (relative to the workpiece or to the chamber) to a moresymmetrical distribution. Following such a transformation, thedistribution (e.g., etch rate distribution) readily may be corrected toa uniform (or nearly uniform) distribution by employing adjustmentfeatures that operate symmetrically relative to the workpiece orrelative to the chamber. In a preferred embodiment, the spatialdistribution of etch rate (for example) across the workpiece istransformed from an asymmetrical distribution to a symmetrical one bytilting an overhead plasma source power applicator relative to theworkpiece at such an angle that the etch rate distribution becomessymmetrical with respect to the cylindrical symmetry of the chamber orof the workpiece. For example, the etch rate, which was initiallydistributed in a non-symmetrical fashion, may be transformed to acenter-high or center-low etch rate distribution across the workpiece.The resulting center-high or center-low etch rate distribution is thenrendered perfectly uniform (or nearly uniform) by adjusting an innerportion of the overhead source power applicator relative to an outerportion of the overhead source power applicator. In a preferredembodiment, the source power applicator is an inductively coupled sourcepower applicator consisting of (at least) a radially inner symmetricallywound conductor coil and a radially outer symmetrically wound conductorcoil concentric with the inner coil. In one implementation, theadjustment of the inner coil relative to outer coil is performed byadjusting the different heights of the inner and outer coils relative tothe workpiece.

Referring to FIG. 1, a plasma reactor for processing a workpiececonsists of a vacuum chamber 100 defined by a cylindrical side wall 105,a ceiling 110 and a floor 115. A workpiece support pedestal 120 on thefloor 115 can hold a workpiece 125 that is either a semiconductor waferor a quartz mask (for example). A process gas supply 130 furnishes aprocess gas at a desired flow rate into the chamber 100 through gasinjection devices 135 which may be provided either in the side wall 105as shown or in the ceiling 110. A pumping annulus 140 is defined betweenthe workpiece support pedestal 120 and the side wall 105, and gas isevacuated from the chamber 100 through the pumping annulus 140 by avacuum pump 145 under the control of a throttle valve 150. Plasma RFsource power is coupled to the gases inside the chamber 100 by an RFplasma source power applicator 160 overlying the ceiling 110. In thepreferred embodiment illustrated in FIG. 1, the source power applicator160 consists of an inner RF coil or helical conductor winding 162 and anouter RF coil or helical conductor winding 164, driven by respective RFsource power generators 166, 168 through respective impedance matches170, 172. RF plasma bias power is coupled to the plasma by an electrodeor conductive grid 175 inside the workpiece support pedestal 120 withbias power applied by an RF bias power generator 180 through animpedance match 185.

In order to adjust the distribution of plasma process non-uniformitiesacross the surface of the workpiece 125, the outer coil 164 can berotated (tilted) about any selected radial axis (i.e., an axis extendingthrough and perpendicular to the chamber's cylindrical or vertical axisof symmetry 190). As one advantage of this feature, we have discoveredthat such a rotation (or “tilt”) of the outer coil 164, if performedabout an optimum radial axis and through an optimum angle, willtransform a non-symmetrical non-uniform spatial distribution of a plasmaprocess parameter (e.g., etch rate) to a symmetrical non-uniformdistribution (i.e., symmetrical about the vertical or cylindrical axisof symmetry 190). The “optimum” radial axis and the “optimum” angle forthis tilt rotation depends upon the individual characteristics of theparticular reactor chamber, among other things, and are determinedempirically prior to processing of a production workpiece, e.g., bytrial and error testing.

Once the etch rate distribution is rendered symmetrical in this manner,its non-uniformities are readily corrected by adjusting the effect ofthe inner coil 162 relative to the outer coil 164. In a preferredembodiment, this adjustment can be made by changing the height above theceiling of one of the coils 162, 164 relative to the other one. For thispurpose, the inner coil 162 is translatable along the cylindrical axisof symmetry 190 relative to the outer coil 164 (and relative to theworkpiece 125 and the entire chamber 100). If for example the etch ratedistribution has been transformed from the typical non-symmetricaldistribution to a symmetrical center-high distribution, then thenon-uniformity is decreased (or eliminated) by translating the innercoil 162 vertically upward (away from the ceiling 110) to decreaseplasma ion density over the center of the workpiece 125. Conversely, iffor example the etch rate distribution has been transformed from thetypical non-symmetrical distribution to a symmetrical center-lowdistribution, then this non-uniformity is decreased (or eliminated) bytranslating the inner coil 162 vertically downward (toward the ceiling110) to increase plasma ion density over the center of the workpiece125.

In an alternative embodiment, adjustment of the effect of the inner coil162 relative to the outer coil can be made by adjusting the relative RFpower levels applied to the different coils 162, 164. This can be inaddition to or in lieu of vertical translation of the inner coil 162.

In the preferred embodiment, the tilt rotation of the outer coil 164 isperformed with very fine control over extremely small rotation angles bya pair of eccentric rings 200, namely a top ring 202 and a bottom ring204, best shown in FIGS. 2A and 2B. The outer coil 164 is supported bythe top ring 202 and (preferably) rotates with the top ring 202. Theupper and lower rings 202, 204 may be thought of as having been formedfrom a single annular ring which has been sliced in a plane 206 that isslanted at some angle “A” relative to the horizontal. As one of the tworings 202, 204 is rotated relative to the other about the cylindricalaxis 190, the top surface of the top ring 202 tilts from the initiallevel orientation of FIG. 2A to the maximum rotation of FIG. 2B. Forthis purpose, the two rings 202, 204 are rotated independently of oneanother about the cylindrical axis 190 by respective top and bottomrotation actuators 210, 215. Either ring 202, 204 may be rotated ineither direction (clockwise, counter-clockwise) about the axis 190 whilethe other ring is held still. Or, the two rings may be rotatedsimultaneously in opposite rotational directions for the fastest changein tilt angle. Also, in order to adjust the orientation of the tiltdirection, the two rings 202, 204 may be rotated simultaneously inunison by the actuators 210, 215 either before or after a desired tiltangle is established. Thus, a typical sequence may be to establish adesired tilt angle by rotating the rings 202, 204 in opposite rotationaldirections until the desired tilt angle is reached, and thenestablishing the azimuthal direction of the tilt angle (e.g., “north”,“south”, “east” or “west” or any direction therebetween) by rotating therings 202, 204 simultaneously in unison—or non-simultaneously—in thesame rotational direction until the tilt direction is oriented asdesired.

While in the preferred embodiment of FIG. 1 only the outer coil 164 iscoupled to the top ring 202, in an alternative embodiment both the innerand outer coils 162, 164 are coupled to the top ring 202 so as to betilted by the tilt actuators 210, 215.

The axial (vertical) translation (up or down) of the inner coil 162 isperformed by a mechanical actuator, such as the screw-drive actuator 220that is depicted in FIG. 1. The screw drive actuator 220 may be formedof non-conducting material and may consist of a threaded female rider222 coupled to the inner coil 162 and a rotatable threaded screw 223threadably engaged with the rider 222. The screw 223 is rotatedclockwise and/or counter-clockwise by a vertical translation motor 224.Alternatively, the actuator 220 may be mounted on support structureoverlying the coil 162 (not shown).

In an alternative (but not preferred) embodiment, the top ring 202supports both the inner and outer coils 162, 164, so that the inner andouter coils 162, 164 tilt simultaneously together.

FIGS. 3A-3C and 4A-4C depict a basic process of the invention.Initially, the outer coil 164 is essentially level relative to the planeof the ceiling 110 and of the workpiece support 120, as depicted in FIG.3A. The etch rate distribution tends to have a non-symmetrical patternof non-uniformity, as depicted in FIG. 4A. The outer coil 164 is thentilted (FIG. 3B) about a particular radial axis by a particular anglethat is sufficiently optimum to transform the non-symmetrical pattern ofetch rate non-uniformities of FIG. 4A to the symmetrical distribution ofnon-uniformities of FIG. 4B. Such an axially symmetrical distribution(FIG. 4B) reflects an etch rate distribution that is either center-highor center-low (for example). This non-uniformity is reduced oreliminated to produce the perfectly uniform distribution of FIG. 4C bytranslating the inner coil 162 either up or down along the vertical axis190, as indicated in FIG. 3C. Preferably, the inner coil 162 is nottilted with the outer coil 164. However, if both coils 162, 164 aretilted together, then the up/down translation of the inner coil 162 maybe along a trajectory that is at a slight angle to the cylindrical axis190.

In order to enable a versatile selection of all modes or combinations ofall possible rotations of the top and bottom rings 162, 164 (i.e, fortilting and/or rotation about the cylindrical axis of the outer coil164) and the vertical translation of the inner coil 162, a processcontroller 250 independently controls each of the rotation actuators210, 215 and the translation actuator 220, as well as the RF generators166, 168, 180.

FIG. 5 depicts another alternative embodiment in which the outer coil164 is suspended from the bottom of a support 255 coupled to the topring 202 (rather than resting on the top ring 202 as in FIG. 1).

FIG. 6 depicts another embodiment in which an intermediate coil 260 isintroduced that lies between the inner and outer coils 162, 164, theintermediate coil being independently driven by an RF source powergenerator 262 through an impedance match 264. This embodiment may beemployed in carrying out certain steps in a process of the invention inwhich each of the three coils 162, 164, 260 are driven with different RFphases (and possible the same RF frequency) to set up different maximaand minima in the RF power density distribution in the plasma generationregion. This in turn is reflected in different patterns in etch ratedistribution across the surface of the workpiece 125. For example, theintermediate coil 260 may be driven 180 degrees out of phase from theinner and outer coils 162, 164.

Returning now to FIG. 1, while the preferred embodiments have beendescribed with reference to apparatus and methods in which the outercoil 164 (at least) is rotated (“tilted”) about a radial axis relativeto the workpiece 125 and relative to the entire chamber 100, theconverse operation could be performed to achieve similar results.Specifically, the workpiece 125 and workpiece support 120 could betilted relative to the source power applicator 160 (and relative to theentire chamber 100) rather than (or in addition to) tilting the outercoil 164. For this purpose, a pair of concentric eccentric rings 360(identical to the rings 162, 164 of FIG. 1), consisting of a top ring362 and a bottom ring 364, are provided under and supporting the wafersupport pedestal 120, so that the pedestal 120 can be tilted in themanner previously described with reference to the outer coil 164.Respective top and bottom actuators 366, 368 separately control rotationof the top and bottom rings 362, 364 about the cylindrical axis 190.

FIG. 7 is a block flow diagram depicting a first method of theinvention. The first step (block 400), is to tilt the RF source powerapplicator 160 (or at least its outer portion or coil 164) relative tothe chamber 100 or relative to the workpiece 125 so as to transform thenon-uniform distribution of a plasma process parameter (e.g., etch rate)from a non-symmetrical non-uniform distribution (FIG. 4A) to an axiallysymmetrical non-uniform distribution (FIG. 4B). The second step (block402) is to vertically translate the inner RF source power applicator(e.g., the inner coil 162) relative to the outer RF source powerapplicator (e.g., the outer coil 164) or relative to the ceiling 110 orworkpiece 125, so as to transform the axially symmetrical non-uniformdistribution of the process parameter (e.g., etch rate) (FIG. 4B) to auniform distribution (FIG. 4C).

FIG. 8 is a block flow diagram depicting another method of the inventionthat can subsume a number of different versions. The first step (block404) is to rotate (tilt) the RF source power applicator 160 (or at leastits outer coil 164) about a radial axis. In one version, this step isperformed initially, i.e., prior to processing a production workpiece(block 404 a). This step may be performed to level the source powerapplicator 160 (or outer coil 164) relative to a datum plane of thechamber 100 (block 404 a-1). Or this step may be performed, as discussedpreviously in this specification, to make the etch rate distributionsymmetrical (or at least nearly so) about the cylindrical axis 190(block 404 a-2). Or, this step may be performed to orient the plane ofcoil 164 relative to a plane of the workpiece 125 (block 404 a-3). Inanother version, this step may be performed continuously duringprocessing (block 404 b). Alternatively, this step may be performednon-continuously or sporadically (block 404 c).

In an alternative embodiment, the purpose of the step of block 404 is totilt the plane of the source power applicator 160 (or at least its outercoil 164) relative to the plane of the workpiece 125, in which caseeither the coil 164 is tilted (using the rotation actuators 210, 215 ofFIG. 1) or the workpiece support 120 is tilted (using the rotationactuators 366, 368). Or, it is possible to simultaneously tilt both theouter coil 164 and the workpiece support 120 until the desired relativeorientation of the plane of one relative to the plane of the other oneis achieved. As described above, the optimum orientation is one in whichthe distribution across the workpiece 125 of a plasma parameter such asetch rate is at least nearly symmetrical relative to the vertical axisof symmetry 190. This enables a symmetrical adjustment in plasmadistribution to render the plasma process parameter distribution atleast nearly uniform. Such a symmetrical adjustment may be a change inthe relative heights of the inner and outer coils 162, 164, or a changein the relative RF power levels applied to the two coils, for example,or a change in respective process gas flow rates to the inner and outerportions of the process region overlying the workpiece 125. Suchadjustments are carried out in some of the steps that are describedbelow.

A next step is to adjust the vertical levels of the inner and/or outerRF source power applicators 162, 164 relative to one another or relativeto the workpiece 125 (block 406). This step may be carried out for thepurpose of transforming a cylindrically symmetrical non-uniform etchrate distribution across the workpiece 125 to a uniform distribution (ornearly uniform), as discussed above in this specification.

A next step is to rotate the RF source power applicator 160 (or at leastits outer coil or portion 164) about the vertical axis during processing(block 408). As mentioned previously in this specification, such a stepmay be carried out by rotating the two eccentric rings 202, 204simultaneously in unison. This step may be carried out continuouslyduring processing (block 408 a). Alternatively, this step may be carriedout non-continuously or sporadically (block 408 b), depending upon thedesired effects during processing. Such a step may average outnon-uniform effects of the source power applicator 160 across thesurface of the workpiece 125 over a number of rotations during a givenplasma process step. The rotation of the source power applicator 160 (orat least its outer portion 164) may be carried out before, during orafter the tilting operation. The difference is that tilting requiresrelative rotational motion about the axis of symmetry 190 of the top andbottom rings 202, 204, whereas pure rotational motion about the axis ofsymmetry by the outer applicator portion 164 requires rotation in unisonof the two rings 202, 204 with no relative motion between the two rings202, 204. These two modes of motion may be performed simultaneously bycombining the two types of relative ring motions. Although the outerapplicator portion 164 may already be tilted so that its axis ofsymmetry does not coincide with the vertical axis 190, its rotationalmotion (when the rings 202, 204 rotate in unison) is neverthelessdefined in this specification as occurring about the vertical axis 190.

A next step (block 410) may be to adjust the respective levels of RFpower delivered to the inner and outer coils 162, 164 independently, inorder to control the radial distribution of a plasma processingparameter (e.g., etch rate) or the effective area of the RF source powerapplicator 160. As one possible example, this step may be carried out tocorrect a symmetrical non-uniform etch rate distribution across theworkpiece surface. As such, this step may be supplementary to (or inlieu of) the vertical translation of the inner coil 162 referred toabove.

Another step (block 412) may be to adjust the RF phase differencesbetween the different (inner/outer) source power applicator portions(e.g., multiple concentric coils 162, 164, 260 of FIG. 6) to control theradial distribution of a plasma processing parameter (e.g., etch rate).Different RF power distributions may be achieved with different phaserelationships between the multiple coils, and some may be optimum forcertain desired processing effects in particular instances.

In a further step that is optional (block 414 of FIG. 8), the processgas flow rates from process gas supplies 130, 131 to inner and outer gasinlets 130 a, 131 a (shown in FIG. 6) may be adjusted relative to oneanother to adjust plasma ion density radial distribution. Theadjustments of block 406 (adjusting the relative axial locations of theinner and outer coils 162, 164), block 410 (adjusting the relative RFpower levels applied to the inner and outer coils 162, 164) and block414 (adjusting the relative gas flow rates to the inner and outer gasinlets 131 a, 130 a) are all symmetrical relative to the vertical axis190 (FIG. 1) and may be used to render the etch rate distribution (forexample) uniform, provided that the etch rate distribution has beentransformed to a symmetrical one by the tilting step of block 404.

While the invention has been described in detail by specific referenceto preferred embodiments, it is understood that variations andmodifications thereof may be made without departing from the true spiritand scope of the invention.

1-20. (canceled)
 21. A method for processing a workpiece in a plasmareactor chamber having radially inner and outer source power applicatorsat a ceiling of said chamber facing said workpiece, said inner and outersource power applicators and said workpiece sharing a common axis ofsymmetry, said method comprising: applying RF source power to saidsource power applicators, and introducing a process gas into the reactorchamber so as to carry out a plasma process on said workpiececharacterized by a plasma process parameter, said plasma processparameter having a spatial distribution across the surface of saidworkpiece; rotating at least said outer RF source power applicator abouta radial tilt axis to a position at which said spatial distribution ofsaid plasma process parameter has at least a nearly minimal non-symmetryrelative to said common axis of symmetry; and translating said innersource power applicator relative to said outer source power applicatoralong said axis of symmetry to a location at which said spatialdistribution has at least a nearly minimal non-uniformity across thesurface of said workpiece.
 22. The method of claim 21 wherein saidrotating and translating steps are carried out before said applyingstep, wherein the optimal amount of rotation and translation ispredetermined.
 23. The method of claim 21 wherein said plasma processparameter is etch rate.
 24. A method for processing a workpiece in aplasma reactor chamber having radially inner and outer source powerapplicators at a ceiling of said chamber facing said workpiece, saidinner and outer source power applicators and said workpiece sharing acommon axis of symmetry, said method comprising: applying RF sourcepower to said source power applicators, and introducing a process gasinto the reactor chamber so as to carry out a plasma process on saidworkpiece characterized by a plasma process parameter, said plasmaprocess parameter having a spatial distribution across the surface ofsaid workpiece; rotating at least said, outer RF source power applicatorabout a radial tilt axis to a position at which said spatialdistribution of said plasma process,.parameter has at least a nearlyminimal non-symmetry relative to said common axis of symmetry; andadjusting the ratio of power levels coupled to a plasma process regionoverlying said workpiece by said inner and outer source powerapplicators.
 25. The method of claim 24 wherein the step of adjustingthe ratio of power levels comprises: translating said inner source powerapplicator relative to said outer source power applicator along saidaxis of symmetry to a location at which said spatial distribution has atleast a nearly minimal non-uniformity across the surface of saidworkpiece.
 26. The method of claim 24 wherein the step of adjustingratio of power levels comprises: adjusting the ratio of RF power levelsapplied to said inner and outer source power applicators.
 27. The methodof claim 24 wherein said rotating and adjusting steps are carried outbefore said applying step, wherein the optimal amount of rotation andtranslation is predetermined.
 28. The method of claim 24 wherein saidplasma process parameter is etch rate.
 29. A method for processing aworkpiece in a plasma reactor chamber having a source power applicatorat a ceiling of said chamber facing said workpiece, said source powerapplicator and said workpiece sharing a common axis of symmetry, saidmethod comprising: applying RF source power to said source powerapplicator, and introducing a process gas into the reactor chamber so asto carry out a plasma process on said workpiece characterized by aplasma process parameter, said plasma process parameter having a spatialdistribution across the surface of said workpiece; increasing thesymmetry of said spatial distribution relative to said axis by rotatingat least a radially outer portion of said source power applicator, abouta respective radial tilt axis; and reducing the non-uniformity of saidspatial distribution by changing said spatial distribution symmetricallywith respect to said axis.
 30. The method of claim 29 wherein the stepof reducing the non-uniformity comprises: translating a radially innerportion of said source power applicator relative to said outer sourcepower applicator along said axis of symmetry.
 31. The method of claim 29wherein the step of reducing the non-uniformity comprises: adjusting theratio of RF power levels applied to respective radially inner and outerportions of said source power applicator.
 32. The method of claim 29wherein the step of reducing the non-uniformity comprises: adjusting theratio of flow rates of process gases to radially inner and outer regionsof said chamber.
 33. The method of claim 29 wherein said processparameter is etch rate.
 34. The method of claim 29 wherein the step ofrotating about a radial tilt axis comprises rotating only the outerportion of the source power applicator.
 35. The method of claim 29wherein the step of rotating about a radial tilt axis comprises rotatingthe entire source power applicator.